Dual cathodes, (twin targets) sputtering metal or semiconductor materials, are particularly suitable for material doping, and reactive magnetron sputtering, oxide, nitride, carbide film deposition.

Features

Using PFC + SiC to form full bridge architecture, combined with DSP + FPGA digital control technology;
Constant power/constant current mode switching, constant power mode can better ensure the repeatability of coating process;
Built-in Arc Arc suppression time setting, matching different targets and processes, recording the number of arcing and counting queries;
Simultaneous detection of V-Arc & I-Arc changes, quick cutoff of output, simultaneous activation of built-in patented technology Eliminate residual arc energy, avoid cathode and substrate arcing, and ensure high precision film layer.

Power characteristic graph

Power supply power W	20KW	30KW
Specification Model	ZY/MFG4-
	2050	3060
Input Parameters
Input voltage & Frequency	3×380Vac ± 10% + PE & 50-60Hz
Output Parameters
Working mode	Constant current and constant power (factory default constant power)
Output current max	50A	60A
Power matching voltage	400V	500V
Ignition voltage max	≥1200V
Output frequency	30-40KHZ 1KHZ Step
Arc detection time	<0.1µs
Arc energy	<0.3 MJ/kW
Max. arc suppression capacity	20000Arc/s
Panel display	3.1 inch OLED screen
Display resolution	1V/0.1A/0.1KW Support X10 Multiple Adjustment
Output accuracy	≤1%, comparison of set values
Efficiency	≥90%, on the premise of rated output
Communication Interface
Analog female interface (standard)	DB25 0-10VDC

Power supply power W	20KW	30KW
Specification Model	ZY/MFG4-
	2050	3060
Communication Interface
RS-485 female interface (standard)	Modbus-RTU DB9 Pin1A 2B
DP female interface (optional, reflected by model suffix)	ProfiBus DB9 Pin3A 8B 5GND
Speedflo gas controller dedicated Interface (optional)	DB9 Female Pin1+2-0-10VDC
Interlock female interface	DB25 (Pin2 Closed with 5)
Cooling water solenoid valve 24VDC interface	GX-12 2 Core Male Pin1+2-
Other
Input cable wiring RVV	≥10mm²/16mm² 80A circuit breaker
Output cable wiring	Suggested model ZY-DJYJVRP 10×2×1.0mm²
Output KF57-3-bit terminal block	M6 Hexagon bolt
Grounding-M6 bolt	4mm² (green/yellow) configuration RV2-4 terminal
Cooling method/inlet flow rate	Water cooling/ ≥8L/min
Cooling water pipe size Φ16mm metric quick screw connector	Φ16mm (OD) × Φ12mm (ID)
Power supply size (mm)	4U 19 "178H ×440W ×647D
Net weight	Approx. 43 kg
Operating temperature	+5℃-45℃

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