BBD Series Anode Auxiliary Power Supply (Double Output) 10+10KW
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Product Introduction
Application
Magnetron sputtering assisted deposition, increased film deposition rate, film bonding force, reduced substrate temperature rise, reduced film defects.
Features
- The power supply adopts DSP + FPGA digital control technology, and the OLED screen displays and stores the power supply status for query at any time and dynamic tracking in real time;
- The output precision is high, the process repeatability is good, and the film layer consistency is good;
- The intelligent arc management system improves the speed of arcing suppression and restart.
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Power supply power |
10KW+10KW (Dual output) |
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Specification Model |
ZY/BBDG4- |
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20100x2 |
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Input Parameters |
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Input voltage & Frequency |
380Vac + PE&50-60HZ |
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Output Parameters |
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Working mode |
Constant voltage/1V step |
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Output current max |
100A ×2 (dual output) |
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Output voltage max |
100V (per output) |
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Output frequency KHZ |
40KHZ ± 0.01% |
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Duty cycle |
15-90% |
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Output waveform |
square wave |
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Arc detection time |
<0.1µs |
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Arc energy |
<0.2mJ/kW |
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Max. arc suppression capacity |
20000Arc/s |
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Operation and display |
3.1 inch OLED display |
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Display resolution |
1V/0.1A/0.1KW |
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Output accuracy |
≤1%, comparison of set values |
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Efficiency |
> 90%, on the premise of rated output |
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Power supply power |
10KW+10KW (Dual output) |
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Specification Model |
ZY/BBDG4- |
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20100x2 |
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Communication Interface |
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Analog female interface (standard) |
DB25 0-10VDC |
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RS-485 female Interface (standard) |
Modbus-RTU DB9 Pin1A 2B |
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DP female interface (optional, reflected by model suffix) |
ProfiBus DB9 Pin3A 8B 5GND |
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Interlock female interface |
DB25 (Pin2 Closed with 5) |
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Cooling water solenoid valve 24VDC interface |
GX-12 2 Core Male Pin1+2- |
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Other |
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Input cable wiring RVV |
≥10mm²/16mm²/63A circuit breaker |
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Output cable wiring |
Suggested model ZY/TCDL-25mm² ×2 |
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Output KF57-3-bit terminal block |
M6 Hexagon bolt |
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Grounding-M6 bolt |
4mm² ( green / yellow) |
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Cooling method/inlet flow rate |
Water cooling /≥8L/min |
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Cooling water pipe size Φ16mm metric quick screw connector |
Φ16mm (OD) × Φ12mm (ID) |
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Power supply size (mm) |
4U 19 "178H ×440W ×566D |
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Net weight |
Approx. 42kg |
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Operating temperature |
+5℃-45℃ |
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Hengyang High‑tech Industrial Development Zone, Hunan, China
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