P Series Anode Layer Ion Source (Strip Ion Source) 8KW / 10KW / 15KW

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Vacuum coating power supply

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ZY MFIONG4F-0803 1003 阳极离子源电源-说明书4U（含通讯协议）.pdf

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Product Introduction

Application

Cleaning substrate surface contaminants (including contaminants such as intrinsic oxides and hydrocarbons, etc.), increasing film adhesion, reducing substrate defects, increasing substrate surface energy, substrate surface roughening and DLC film deposition.

Features

Adopt PFC + full bridge framework combined with ARM + DSP digital control technology;
Simultaneous detection of V- ARC & I- ARC quick cutoff output and simultaneous start of built-in patented technology to eliminate residual ARC energy, avoid discharge arcing with the substrate, ensure high- precision film layer, improve the yield of plated parts, surface finish and film layer bonding force.

Power supply power	8KW	10KW	15KW
Speciﬁcation Model	ZY/PIONG4F-
	0803	1003	1505
Input Parameters
Input voltage & Frequency	3×380Vac±10%+PE&50-60Hz
Output Parameters
Working mode	Constant pressure
Output current max	3A	3A	5A
Output voltage max	2500V	3000V	3000V
Output frequency	40KHZ
Output duty cycle	10-90% (factory default 50)
Output form	Pulse
Arc detection time	<0.1µs
Max. arc suppression capacity	20000Arc/s
Arc energy	<0.2mJ/kW
Panel display	3.1 inch OLED screen
Display resolution	1V/1mA/1W
Output accuracy	≤1%, comparison of set values

Power supply power	8KW	10KW	15KW
Speciﬁcation Model	ZY/PIONG4F-
	0803	1003	1505
Output Parameters
Efficiency	≥90%, on the premise of rated output
Communication Interface
Analog female interface (standard)	DB25 0-10VDC
RS-485 female Interface (standard)	Modbus-RTU DB9 Pin1A 2B
DP female interface (optional, reflected by model suffix)	ProfiBus DB9 Pin3A 8B 5GND
Interlock female interface	DB25 (Pin2 Closed with 5)
Other
Input cable wiring RVV	≥6mm²/10mm² 32A circuit breaker
Output cable wiring 5m/M4 bolt	HM-GYX-5KV/1.5mm² OT4-5 Terminal
Grounding-M6 Bolt	4mm² (green/yellow) configuration OT4-5 terminal
Power supply size (mm)	4U 19 "178H ×440W ×647D
Net weight	Approx. 34kg	Approx. 35kg	Approx. 36kg
Cooling method	Air cooling
Operating temperature	+5℃-45℃

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